October 15, 2018 (Vol. 38, No. 18)

Opto Diode

The AXUV100TF030 -TF400 photodetectors feature 100 mm2 active areas and directly deposited thin-film filters for extreme ultraviolet (EUV) detection. The -TF030 features typical responsivity of 0.16 A/W at 3 nm and has a detection range from 1 nm to 12 nm. The -TF400 features typical responsivity of 0.15 A/W at 40 nm with a detection range from 18 nm to 80 nm. Both devices are shipped with a temporary protective cover and have superior stability for robust operation in EUV environments. Operating and storage temperatures range from –10 °C to +40 °C in ambient environments and from –20 °C to +80 °C in nitrogen or vacuum environments.